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Micro Fabrication Technology Centre

Introduction

HKPC's Micro Fabrication Technology Centre facilitates the adoption of non-silicon micro-fabrication as an enabling technology by the local R&D community and high-tech companies. The Centre is engaged in the promotion, dissemination and commercialization of micro-fabrication applications, as well as the co-ordination and integration of diverse technologies that go into micro-fabrication.

Micro-injection moulding
Micro-injection moulding

Objectives

  • To acquire the know-how and experience in micro-fabrication for non-silicon MEMS
  • To develop enabling technologies in micro-machining, micro-EDM, micro-injection moulding as well as ultra precision hot embossing
  • To develop industrial applications of miniaturized products via micro-production
  • To support the micro-engineering R&D community and technology intensive industries via bureau services
  • To provide technical seminars and hands-on training programmes

Services

Single Point Diamond Turning (SPDT)
Single Point Diamond Turning (SPDT)
Single Point Diamond Turning (SPDT)


Precitech Nanoform200

  • A single-crystal natural diamond cutting tool is used to generate surface on a non-ferrous substrate with submicron   dimensional tolerances.
  • Each linear axis provides 8.6nm positioning feedback resolution.
  • Applications include fabrication of high-precision microlens and micro-groove machining.



4-axis Freeform Machining
4-axis Freeform Machining
4-axis Freeform Machining


Precitech Freeform 204

  • The ultra-precision, 4-axis computer controlled machine centre is equipped to undertake various kinds of micro-optical and mechanical component manufacturing and micro mould making.
  • Three dimensional freeform milling, 2-axis diamond turning, linear and variable pitch micro-grooving.
  • Applications include freeform microlens and micro-mould inserts.



Micro-EDM
Micro-EDM
Micro-EDM


SARIX HPM

  • For micro-holes, micro-machining and micro-forms
  • High precision micro-holes and shape holes down to 20 microns
  • High precision positioning accuracy up to +/- 1 micron

Case Studies

Asymmetric Aspheric Lenses in Photonics
  • Low cost 10G 850nm VCESEL packages. This completely new and precise lens system will be used in transmitters and receivers of high speed board band systems.
  • This is a 3-mm in length, off-axis asymmetric lens system with form accuracy up to nano scale.
  • HKPC is the only available source in Hong Kong to provide a cost-effective manufacturing platform.
  • The system has a total of four optical surfaces, including a hemispherical surface and an asymmetrical aspheric surface at the two ends, and a plano rectangular surface and cylindrical surface on the two sides.
Asymmetric Aspheric Lenses in Photonics
Asymmetric Aspheric Lenses in Photonics



Micro-fabrication of Micro-pin Lens
  • It is a lens system with critical requirements in high reliability and low cost.
  • Owing to the lens size (less than 0.5mm in diameter), the lens prototype cannot be machined directly using a commercially available precision machine.
  • HKPC developed an innovative quick mould platform for precision lens production for design evaluation.
  • It was the first project undertaken in Hong Kong in precision electro-forming and micro-fabrication technology for such a small sized lens.
Micro-fabrication of Micro-pin Lens
Micro-fabrication of Micro-pin Lens



Micro-optical Components for Data Transmission
  • This is an opto-electronic component machined with form accuracy up to single-digit micron.
  • There are three critical parts in this module, including precision lens, laser and fibre cables for transmitting the data in fibre optics.
  • This new opto-electronic system can be applied in different modules. It will carry signals with much less energy loss than the current one in the market, and with a much higher bandwidth as well.
Micro-optical Components for Data Transmission
Micro-optical Components for Data Transmission
Micro-optical Components for Data Transmission
Micro-optical Components for Data Transmission



Non-silicon Micro Pump

HKPC successfully develops cost-effective non-silicon micro pump by micro-fabrication. In Micro Electrical and Mechanical System (MEMS), the adoption of non-silicon material, like polymer, is growing owing to the availability of low-cost and high-volume fabrication. The micro pump is a non-silicon MEMS jointly developed with Scuola Superiore Sant' Anna from Italy. The development opens up the technology and opportunity in micro-fabrication for medical devices.

Non-silicon Micro Pump
Non-silicon Micro Pump
Micro Pump Manufacturing Process

1. Embossing tool fabricated by micro-machining/micro-EDM

“1.


2. Embossing tool embedded into Ultra-precision Hot Embossing Machine

Under pressure and temperature cycle to replicate the micro-channels onto the PMMA substrate.

2. Embossing tool embedded into Ultra-precision Hot Embossing Machine
2. Embossing tool embedded into Ultra-precision Hot Embossing Machine


3. PMMA substrate of Micro Pump before and after hot embossing (Length x width: 15mm x 9mm)

Critical dimensions of the Micro channels are down to micron-scale. Average roughness at measured regions is of sub-micron level. Form errors of top and bottom surface are of single-digit microns.

“3.
“3.


4. Assembly of Micro Pump

4. Assembly of Micro Pump
4. Assembly of Micro Pump


5. Completed Micro Pump

5. Completed Micro Pump
5. Completed Micro Pump

Specification
  • Dimension: 25mm x 20mm x 3mm
  • Material of micro-fluidic component: Polymethyl methacrylate (PMMA)
  • Maximum flow rate: 70μl/min
  • Applied signal: 100 V p-v square wave signal at 2.3KHz